# Charting Progress In Semiconductor Fabrication

> From the ACS meeting Electronic semiconductor devices are ubiquitous—from computers to cars to industrial process control. At a symposium on polymers for micropatterning and nanopatterning sponsored by the Division of Polymeric Materials: Science & Engineering, chemists reported progress in the fabr...

## Metadata
- Authors: STEPHEN C. STINSON
- Journal: Chemical & Engineering News
- Published: 1999-09-13
- DOI: https://doi.org/10.1021/cen-v077n037.p037
- Source: OpenAlex

## Technology Hub
- Hub: Semiconductor Technology
- Discipline: Engineering / Materials Science
- Hub URL: https://science-database.com/technology/semiconductor
- Hub llms.txt: https://science-database.com/technology/semiconductor/llms.txt

## Abstract
From the ACS meeting Electronic semiconductor devices are ubiquitous—from computers to cars to industrial process control. At a symposium on polymers for micropatterning and nanopatterning sponsored by the Division of Polymeric Materials: Science & Engineering, chemists reported progress in the fabrication of such devices. Their progress will make possible the data-processing units and memory chips of the future. A key semiconductor fabrication technology is microlithography—the etching, doping, and plating of devices onto semiconductor surfaces at resolutions of micrometers to nanometers. Achieving ever-finer patterns—needed for smaller and faster devices—depends on polymeric resins called photoresists. It became clear during the symposium that microlithography might eventually be superseded by advances in new technologies—"drawing" of patterns on resist layers by electron beams, for example, or "printing," "rubberstamping," or molding of images at exquisitely fine resolution onto semiconductor surfaces. But as several sessions made clear, advances are still being made in microlithography at the finer resolutions made possible by ...

## Links
- DOI: https://doi.org/10.1021/cen-v077n037.p037
- OpenAlex: https://openalex.org/W2321204170
- JSON API: https://science-database.com/api/v1/technology/semiconductor

---
Generated by science-database.com — The Knowledge Interface
Paper ID: oa-W2321204170 | Hub: semiconductor