# Semiconductor Technology — science-database.com > Advanced semiconductor manufacturing and design. Covers chip fabrication below 3nm, EUV lithography, novel materials, chiplet architectures, and neuromorphic computing. - Discipline: Engineering / Materials Science - URL: https://science-database.com/technology/semiconductor - API: https://science-database.com/api/v1/technology/semiconductor - Last Updated: 2026-09-08T05:41:21.192Z - Articles Indexed: 15 ## Top Publications ### Plasmonics: Merging Photonics and Electronics at Nanoscale Dimensions - Authors: Ekmel Özbay - Journal: Science - Date: 2006-01-12 - DOI: https://doi.org/10.1126/science.1114849 - Citations: 4565 - Source: OpenAlex - llms.txt: https://science-database.com/technology/semiconductor/paper/oa-W2142269155/llms.txt - Abstract: Electronic circuits provide us with the ability to control the transport and storage of electrons. However, the performance of electronic circuits is now becoming rather limited when digital information needs to be sent from one point to another. Photonics offers an effective solution to this proble... ### Transport phenomena in nanofluidics - Authors: Reto B. Schoch, Jongyoon Han, Philippe Renaud - Journal: Reviews of Modern Physics - Date: 2008-07-17 - DOI: https://doi.org/10.1103/revmodphys.80.839 - Citations: 1917 - Source: OpenAlex - llms.txt: https://science-database.com/technology/semiconductor/paper/oa-W2130869501/llms.txt - Abstract: The transport of fluid in and around nanometer-sized objects with at least one characteristic dimension below $100\phantom{\rule{0.3em}{0ex}}\mathrm{nm}$ enables the occurrence of phenomena that are impossible at bigger length scales. This research field was only recently termed nanofluidics, but it... ### Humidity Sensors Principle, Mechanism, and Fabrication Technologies: A Comprehensive Review - Authors: Hamid Farahani, Rahman Wagiran, Mohd Nizar Hamidon - Journal: Sensors - Date: 2014-04-30 - DOI: https://doi.org/10.3390/s140507881 - Citations: 1274 - Source: OpenAlex - llms.txt: https://science-database.com/technology/semiconductor/paper/oa-W2001086979/llms.txt - Abstract: Humidity measurement is one of the most significant issues in various areas of applications such as instrumentation, automated systems, agriculture, climatology and GIS. Numerous sorts of humidity sensors fabricated and developed for industrial and laboratory applications are reviewed and presented ... ### Plasmon slot waveguides: Towards chip-scale propagation with subwavelength-scale localization - Authors: Jennifer A. Dionne, Luke A. Sweatlock, Harry A. Atwater, Albert Polman - Journal: Physical Review B - Date: 2006-01-05 - DOI: https://doi.org/10.1103/physrevb.73.035407 - Citations: 1153 - Source: OpenAlex - llms.txt: https://science-database.com/technology/semiconductor/paper/oa-W2051597024/llms.txt - Abstract: We present a numerical analysis of surface plasmon waveguides exhibiting both long-range propagation and spatial confinement of light with lateral dimensions of less than 10% of the free-space wavelength. Attention is given to characterizing the dispersion relations, wavelength-dependent propagation... ### Gas-assisted focused electron beam and ion beam processing and fabrication - Authors: Ivo Utke, P. Hoffmann, J. Melngailis - Journal: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena - Date: 2008-07-01 - DOI: https://doi.org/10.1116/1.2955728 - Citations: 1026 - Source: OpenAlex - llms.txt: https://science-database.com/technology/semiconductor/paper/oa-W1973381743/llms.txt - Abstract: Beams of electrons and ions are now fairly routinely focused to dimensions in the nanometer range. Since the beams can be used to locally alter material at the point where they are incident on a surface, they represent direct nanofabrication tools. The authors will focus here on direct fabrication r... ### Microelectromechanical systems (MEMS): fabrication, design and applications - Authors: Jack W. Judy - Journal: Smart Materials and Structures - Date: 2001-11-28 - DOI: https://doi.org/10.1088/0964-1726/10/6/301 - Citations: 825 - Source: OpenAlex - llms.txt: https://science-database.com/technology/semiconductor/paper/oa-W2126326964/llms.txt - Abstract: Micromachining and micro-electromechanical system (MEMS) technologies can be used to produce complex structures, devices and systems on the scale of micrometers. Initially micromachining techniques were borrowed directly from the integrated circuit (IC) industry, but now many unique MEMS-specific mi... ### Organic Lasers: Recent Developments on Materials, Device Geometries, and Fabrication Techniques - Authors: Alexander J. C. Kuehne, Malte C. Gather - Journal: Chemical Reviews - Date: 2016-08-08 - DOI: https://doi.org/10.1021/acs.chemrev.6b00172 - Citations: 792 - Source: OpenAlex - llms.txt: https://science-database.com/technology/semiconductor/paper/oa-W2498063088/llms.txt - Abstract: Organic dyes have been used as gain medium for lasers since the 1960s, long before the advent of today's organic electronic devices. Organic gain materials are highly attractive for lasing due to their chemical tunability and large stimulated emission cross section. While the traditional dye laser h... ### Synthesis, assembly and applications of semiconductor nanomembranes - Authors: John A. Rogers, M. G. Lagally, Ralph G. Nuzzo - Journal: Nature - Date: 2011-08-30 - DOI: https://doi.org/10.1038/nature10381 - Citations: 713 - Source: OpenAlex - llms.txt: https://science-database.com/technology/semiconductor/paper/oa-W1969448305/llms.txt ### Large-scale quantum-emitter arrays in atomically thin semiconductors - Authors: Carmen Palacios-Berraquero, Dhiren M. Kara, Alejandro R.‐P. Montblanch, Matteo Barbone, Pawel Latawiec, Duhee Yoon, Anna K. Ott, Marko Lončar, Andrea C. Ferrari, Mete Atatüre - Journal: Nature Communications - Date: 2017-05-22 - DOI: https://doi.org/10.1038/ncomms15093 - Citations: 623 - Source: OpenAlex - llms.txt: https://science-database.com/technology/semiconductor/paper/oa-W2519556550/llms.txt - Abstract: Quantum light emitters have been observed in atomically thin layers of transition metal dichalcogenides. However, they are found at random locations within the host material and usually in low densities, hindering experiments aiming to investigate this new class of emitters. Here, we create determin... ### Silicon Device Scaling to the Sub-10-nm Regime - Authors: M. Ieong, B. Doris, J. Kedzierski, K. Rim, Min Yang - Journal: Science - Date: 2004-12-16 - DOI: https://doi.org/10.1126/science.1100731 - Citations: 573 - Source: OpenAlex - llms.txt: https://science-database.com/technology/semiconductor/paper/oa-W2007104515/llms.txt - Abstract: In the next decade, advances in complementary metal-oxide semiconductor fabrication will lead to devices with gate lengths (the region in the device that switches the current flow on and off) below 10 nanometers (nm), as compared with current gate lengths in chips that are now about 50 nm. However, ... ### On-chip light sources for silicon photonics - Authors: Zhiping Zhou, Bing Yin, Jürgen Michel - Journal: Light Science & Applications - Date: 2015-11-20 - DOI: https://doi.org/10.1038/lsa.2015.131 - Citations: 572 - Source: OpenAlex - llms.txt: https://science-database.com/technology/semiconductor/paper/oa-W2336371078/llms.txt - Abstract: Serving as the electrical to optical converter, the on-chip silicon light source is an indispensable component of silicon photonic technologies and has long been pursued. Here, we briefly review the history and recent progress of a few promising contenders for on-chip light sources in terms of opera... ### Nanopore Fabrication by Controlled Dielectric Breakdown - Authors: Harold Kwok, Kyle Briggs, Vincent Tabard‐Cossa - Journal: PLoS ONE - Date: 2014-03-21 - DOI: https://doi.org/10.1371/journal.pone.0092880 - Citations: 471 - Source: OpenAlex - llms.txt: https://science-database.com/technology/semiconductor/paper/oa-W2007138906/llms.txt - Abstract: Nanofabrication techniques for achieving dimensional control at the nanometer scale are generally equipment-intensive and time-consuming. The use of energetic beams of electrons or ions has placed the fabrication of nanopores in thin solid-state membranes within reach of some academic laboratories, ... ### A microprocessor based on a two-dimensional semiconductor - Authors: Stefan Wachter, Dmitry K. Polyushkin, Ole Bethge, Thomas Mueller - Journal: Nature Communications - Date: 2017-04-11 - DOI: https://doi.org/10.1038/ncomms14948 - Citations: 416 - Source: OpenAlex - llms.txt: https://science-database.com/technology/semiconductor/paper/oa-W2560834721/llms.txt - Abstract: The advent of microcomputers in the 1970s has dramatically changed our society. Since then, microprocessors have been made almost exclusively from silicon, but the ever-increasing demand for higher integration density and speed, lower power consumption and better integrability with everyday goods ha... ### Nanoimprint lithography steppers for volume fabrication of leading-edge semiconductor integrated circuits - Authors: S. V. Sreenivasan - Journal: Microsystems & Nanoengineering - Date: 2017-09-25 - DOI: https://doi.org/10.1038/micronano.2017.75 - Citations: 225 - Source: OpenAlex - llms.txt: https://science-database.com/technology/semiconductor/paper/oa-W2757913998/llms.txt - Abstract: This article discusses the transition of a form of nanoimprint lithography technology, known as Jet and Flash Imprint Lithography (J-FIL), from research to a commercial fabrication infrastructure for leading-edge semiconductor integrated circuits (ICs). Leading-edge semiconductor lithography has som... ### Sub-10 nm fabrication: methods and applications - Authors: Yiqin Chen, Zhiwen Shu, Shi Zhang, Pei Zeng, Huikang Liang, Mengjie Zheng, Huigao Duan - Journal: International Journal of Extreme Manufacturing - Date: 2021-06-04 - DOI: https://doi.org/10.1088/2631-7990/ac087c - Citations: 209 - Source: OpenAlex - llms.txt: https://science-database.com/technology/semiconductor/paper/oa-W3166690669/llms.txt - Abstract: Abstract Reliable fabrication of micro/nanostructures with sub-10 nm features is of great significance for advancing nanoscience and nanotechnology. While the capability of current complementary metal-oxide semiconductor (CMOS) chip manufacturing can produce structures on the sub-10 nm scale, many e... --- Generated by science-database.com — The Knowledge Interface Full data available at: https://science-database.com/api/v1/technology/semiconductor